The Collaborative International Dictionary of English v.0.48:

Atomization \At`om*i*za"tion\, n.
   1. The act of reducing to atoms, or very minute particles; or
      the state of being so reduced.
      [1913 Webster]

   2. (Med.) The reduction of fluids into fine spray.
      [1913 Webster]

WordNet (r) 3.0 (2006):

atomization
    n 1: separating something into fine particles [syn:
         atomization, atomisation, fragmentation]
    2: annihilation by reducing something to atoms [syn:
       atomization, atomisation]

Moby Thesaurus II by Grady Ward, 1.0:

111 Moby Thesaurus words for "atomization":
   ablation, abrasion, aeration, aerification, alpha decay,
   alteration, analysis, anatomization, atom-chipping, atom-smashing,
   atomic disintegration, atomic reaction, attrition, beating,
   beta decay, bombardment, breakup, brecciation, breeding, bullet,
   chain reaction, change, circumstantiation, cleavage, comminution,
   corrosion, crumbling, crushing, decay, decomposition, degradation,
   demarcation, desynonymization, detrition, differencing,
   differentiation, dilapidation, discrimination, disequalization,
   disintegration, disintegration series, disjunction,
   disorganization, dissociation, dissolution, distillation,
   distinction, distinguishment, diversification, division, erosion,
   etherealization, etherification, evaporation, exchange reaction,
   exhalation, fission, fission reaction, fluidization, fractionation,
   fragmentation, fumigation, gamma decay, gasification, granulation,
   granulization, grating, grinding, incoherence, individualization,
   individuation, ionization, itemization, levigation, mashing,
   modification, neutron reaction, nonreversible reaction,
   nuclear fission, nucleization, particularization, personalization,
   photodisintegration, pounding, powdering, proton gun,
   proton reaction, ravages of time, resolution, reversible reaction,
   segregation, separation, severalization, severance, shredding,
   smashing, smoking, specialization, specification,
   splitting the atom, steaming, stimulation, sublimation, target,
   thermonuclear reaction, trituration, vaporization, variation,
   volatilization, wear, wear and tear