The Collaborative International Dictionary of English v.0.48:

Photolithography \Pho`to*li*thog"ra*phy\, n.
   1. The art or process of producing photolithographs.
      [1913 Webster]

   2. The process by which the image of a pattern is transferred
      photographically to a sensitive surface, and the surface
      subsequently etched; used for printing or in the
      production of integrated circuits.
      [PJC] Photologic

WordNet (r) 3.0 (2006):

photolithography
    n 1: a planographic printing process using plates made from a
         photographic image