The Free On-line Dictionary of Computing (19 January 2023):

microelectromechanical system
MEMS

    (MEMS) The integration of mechanical structures
   (moving parts) with microelectronics.  MEMS devices are
   "custom" designed for a purpose which requires a mechanical
   action to be controlled by a computer.

   Applications include sensors, medical devices, process
   controls.

   (http://mems.mcnc.org/).

   See also nanotechnology.

   (1999-03-25)