The Collaborative International Dictionary of English v.0.48:

Atomization \At`om*i*za"tion\, n.
   1. The act of reducing to atoms, or very minute particles; or
      the state of being so reduced.
      [1913 Webster]

   2. (Med.) The reduction of fluids into fine spray.
      [1913 Webster]

WordNet (r) 3.0 (2006):

atomization
    n 1: separating something into fine particles [syn:
         atomization, atomisation, fragmentation]
    2: annihilation by reducing something to atoms [syn:
       atomization, atomisation]