The Collaborative International Dictionary of English v.0.48:
Atheous \A"the*ous\, a. [Gr. ? without God. See Atheist.] 1. Atheistic; impious. [Obs.] --Milton. [1913 Webster] 2. Without God, neither accepting nor denying him. [1913 Webster] I should say science was atheous, and therefore could not be atheistic. --Bp. of Carlisle. [1913 Webster]